Periodical Microstructures Based on Novel Piezoelectric Material for Biomedical Applications

Abstract

A novel cantilever type piezoelectric sensing element was developed. Cost-effective and simple fabrication design allows the use of this element for various applications in the areas of biomedicine, pharmacy, environmental analysis and biosensing. This paper proposes a novel piezoelectric composite material whose basic element is PZT and a sensing platform where this material was integrated. Results showed that a designed novel cantilever-type element is able to generate a voltage of up to 80 µV at 50 Hz frequency. To use this element for sensing purposes, a four micron periodical microstructure was imprinted. Silver nanoparticles were precipitated on the grating to increase the sensitivity of the designed element, i.e., Surface Plasmon Resonance (SPR) effect appears in the element. To tackle some issues (a lack of sensitivity, signal delays) the element must have certain electronic and optical properties. One possible solution, proposed in this paper, is a combination of piezoelectricity and SPR in a single element.

Keywords

• PZT
• piezoelectric effect
• periodical microstructure
• SPR