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ACS Omega
(Jun 2020)
Effect of the Al2O3 Deposition Method on Parylene C: Highlights on a Nanopillar-Shaped Surface
Joanna Njeim,
David Alamarguy,
Xiaolong Tu,
Alan Durnez,
Xavier Lafosse,
Pascal Chretien,
Ali Madouri,
Zhuoxiang Ren,
David Brunel
Affiliations
Joanna Njeim
Sorbonne Université, CNRS, Laboratoire de Génie Electrique et Electronique de Paris, Paris, France
David Alamarguy
Université Paris-Saclay, CentraleSupélec, CNRS, Laboratoire de Génie Electrique et Electronique de Paris, Gif-sur-Yvette, France
Xiaolong Tu
Sorbonne Université, PSL Université, Ecole Normale Supérieure, PASTEUR, Département de Chimie, CNRS, Paris, France
Alan Durnez
Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, Palaiseau, France
Xavier Lafosse
Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, Palaiseau, France
Pascal Chretien
Université Paris-Saclay, CentraleSupélec, CNRS, Laboratoire de Génie Electrique et Electronique de Paris, Gif-sur-Yvette, France
Ali Madouri
Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, Palaiseau, France
Zhuoxiang Ren
Sorbonne Université, CNRS, Laboratoire de Génie Electrique et Electronique de Paris, Paris, France
David Brunel
Sorbonne Université, CNRS, Laboratoire de Génie Electrique et Electronique de Paris, Paris, France
DOI
https://doi.org/10.1021/acsomega.0c00735
Journal volume & issue
Vol. 5, no. 26
pp. 15828 – 15834
Abstract
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No abstracts available.
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