Ultra-High-Sensitivity, Miniaturized Fabry-Perot Interferometric Fiber-Optic Microphone for Weak Acoustic Signals Detection

Guojie Wu; Haie Li; Hongxin Ye; Zhenfeng Gong; Junsheng Ma; Min Guo; Ke Chen; Wei Peng; Qingxu Yu; Liang Mei

doi:10.3390/s22186948

Sensors (Sep 2022)

Ultra-High-Sensitivity, Miniaturized Fabry-Perot Interferometric Fiber-Optic Microphone for Weak Acoustic Signals Detection

Guojie Wu,
Haie Li,
Hongxin Ye,
Zhenfeng Gong,
Junsheng Ma,
Min Guo,
Ke Chen,
Wei Peng,
Qingxu Yu,
Liang Mei

Affiliations

Guojie Wu: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
Haie Li: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
Hongxin Ye: School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China
Zhenfeng Gong: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
Junsheng Ma: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
Min Guo: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
Ke Chen: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
Wei Peng: School of Physics, Dalian University of Technology, Dalian 116024, China
Qingxu Yu: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
Liang Mei: School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China

DOI: https://doi.org/10.3390/s22186948
Journal volume & issue: Vol. 22, no. 18
p. 6948

Abstract

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An ultra-high-sensitivity, miniaturized Fabry-Perot interferometric (FPI) fiber-optic microphone (FOM) has been developed, utilizing a silicon cantilever as an acoustic transducer. The volumes of the cavity and the FOM are determined to be 60 microliters and 102 cubic millimeters, respectively. The FOM has acoustic pressure sensitivities of 1506 nm/Pa at 2500 Hz and 26,773 nm/Pa at 3233 Hz. The minimum detectable pressure (MDP) and signal-to-noise ratio (SNR) of the designed FOM are 0.93 μPa/Hz1/2 and 70.14 dB, respectively, at an acoustic pressure of 0.003 Pa. The designed FOM has the characteristics of ultra-high sensitivity, low MDP, and small size, which makes it suitable for the detection of weak acoustic signals, especially in the field of miniaturized all-optical photoacoustic spectroscopy.

Published in Sensors

ISSN: 1424-8220 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Chemical technology
Website: http://www.mdpi.com/journal/sensors

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