Ultra-low voltage SEM observation for battery materials

• Nagaoka Yutaka,
• Hashimoto Yoichiro,
• Aiso Toru,
• Yabu Shuhei,
• Sasajima Masahiro

Affiliations

Nagaoka Yutaka

Solution Development Dept., Hitachi High-Tech Corporation

Hashimoto Yoichiro

Solution Development Dept., Hitachi High-Tech Corporation

Aiso Toru

Solution Development Dept., Hitachi High-Tech Corporation

Yabu Shuhei

Electron Microscope Systems Design Dept., Hitachi High-Tech Corporation

Sasajima Masahiro

Software Design Dept., Hitachi High-Tech Corporation