Distributions of electric parameters in MOS structures on 3C-SiC substrate

• Piskorski Krzysztof,
• Przewlocki Henryk,
• Esteve Romain,
• Bakowski Mietek

Affiliations

Piskorski Krzysztof

Institute of Electron Technology, Al. Lotnikow 32/46, 02-668, Warsaw, Poland

Przewlocki Henryk

Institute of Electron Technology, Al. Lotnikow 32/46, 02-668, Warsaw, Poland

Esteve Romain

ACREO AB, Electrum 236, SE-164 40, Kista, Sweden

Bakowski Mietek

ACREO AB, Electrum 236, SE-164 40, Kista, Sweden