Journal of Intelligent Systems (Jun 1997)

Artificial Neural Network Based Detection and Diagnosis of Plasma-Etch Faults

  • Baluja, Shumeet,
  • Maxion, Roy A.

DOI
https://doi.org/10.1515/JISYS.1997.7.1-2.57
Journal volume & issue
Vol. 7, no. 1-2
pp. 57 – 82

Abstract

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