Enhanced NO₂-Sensing Properties of Au-Loaded Porous In₂O₃ Gas Sensors at Low Operating Temperatures

Abstract

NO2-sensing properties of semiconductor gas sensors using porous In2O3 powders loaded with and without 0.5 wt% Au (Au/In2O3 and In2O3 sensors, respectively) were examined in wet air (70% relative humidity at 25 °C). In addition, the effects of Au loading on the increased NO2 response were discussed on the basis of NO2 adsorption/desorption properties on the oxide surface. The NO2 response of the Au/In2O3 sensor monotonically increased with a decrease in the operating temperature, and the Au/In2O3 sensor showed higher NO2 responses than those of the In2O3 sensor at a temperature of 100 °C or lower. In addition, the response time of the Au/In2O3 sensor was much shorter than that of the In2O3 sensor at 30 °C. The analysis based on the Freundlich adsorption mechanism suggested that the Au loading increased the adsorption strength of NO2 on the In2O3 surface. Moreover, the Au loading was also quite effective in decreasing the baseline resistance of the In2O3 sensor in wet air (i.e., increasing the number of free electrons in the In2O3), which resulted in an increase in the number of negatively charged NO2 species on the In2O3 surface. The Au/In2O3 sensor showed high response to the low concentration of NO2 (ratio of resistance in target gas to that in air: ca. 133 to 0.1 ppm) and excellent NO2 selectivity against CO and ethanol, especially at 100 °C.

Keywords

• semiconductor gas sensor
• NO₂
• porous In₂O₃
• loading of Au
• ultrasonic spray pyrolysis
• Freundlich adsorption isotherm