Modified residual gas analyzer for measuring the ion mass-to-charge composition of a repetitively pulsed plasma

Abstract

We describe the use of a modified residual gas analyzer based on a quadrupole mass spectrometer to measure the ion mass-to-charge composition of the plasma of a repetitively pulsed planar magnetron discharge. The pulse duration and frequency parameters necessary to ensure reliable plasma ion composition data are determined. Examples of measurements of the ion mass-to-charge spectra are given.