Bulletin of the Polish Academy of Sciences: Technical Sciences (Apr 2018)

Characterization of the ionization process inside a miniature glow-discharge micropump

  • T. Grzebyk,
  • A. Górecka-Drzazga

DOI
https://doi.org/10.24425/122097
Journal volume & issue
Vol. 66, no. No 2 (Special Section on Nano- and Micromechanics)
pp. 173 – 178

Abstract

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Keywords