ACS Omega (Sep 2017)

New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films

  • Seong Ho Han,
  • Sheby Mary George,
  • Ga Yeon Lee,
  • Jeong Hwan Han,
  • Bo Keun Park,
  • Chang Gyoun Kim,
  • Seung Uk Son,
  • Myoung Soo Lah,
  • Taek-Mo Chung

DOI
https://doi.org/10.1021/acsomega.7b00800
Journal volume & issue
Vol. 2, no. 9
pp. 5486 – 5493

Abstract

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