Formation of Intermetallic Phases in Ion Implantation

Abstract

This paper presents a model for the formation of intermetallic phases in the modified nickel ions in the surface layer of aluminum. It is shown that the absorption of ions in the bulk of the qualitative difference between the models with and without the relaxation of the mass flux is reduced to a difference in the characteristic scales. It was shown that the concentration distribution depends on the relation between time scales of various physical processes. We have extended the existing model to a unique simple model describing the formation of a new phase at the initial stage of ion implantation. The parameters containing in the model were evaluated using literature data. The known problem is a special case for our model.