A Positioning and Tracking Performance–Enhanced Composite Control Algorithm for the Macro–Micro Precision Stage

Abstract

In the macro–micro composite motion process, the macro stage achieves rapid motion in a large workspace, while the micro stage realizes precise positioning within a small displacement. The large-stroke and high-speed motion of the macro stage is influenced by nonlinear friction, overshooting, and vibrations, making it challenging to achieve rapid stabilization within the travel range of the micro stage, thereby impacting equipment operation efficiency. This paper proposes a composite controller structure designed to solve the fast point-to-point positioning of the macro stage driven by a linear motor and enhance the trajectory tracking performance of the stage. The proposed composite control algorithm (CCA) includes velocity feed-forward, gain-scheduled proportional integral differential (PID) control, and a plug-in repetitive control method. By employing a tracking differentiator, velocity feed-forward, and a gain-scheduled PID controller, the control algorithm can realize rapid stabilization and positioning for the macro stage. Through velocity feed-forward, gain-scheduled PID control, and a plug-in repetitive controller, the control algorithm can reduce the trajectory tracking error of the stage. Simulations and experimental studies of point response and sinusoidal trajectory tracking are carried out on a macro–micro stage to verify the effectiveness of the composite controller for the linear motor. The experimental results demonstrate that the proposed composite controller effectively reduces the macro stage’s settling time and overshoot, and improves the accuracy of sinusoidal trajectory tracking, which lays a foundation for submicron positioning accuracy in high-speed macro–micro motion stages.

Keywords

• macro–micro stage
• precision positioning
• trajectory tracking
• composite control algorithm (CCA)