A High-Precision Three-Dimensional Probe Array Temperature Sensor

Bian Tian; Yifan Xing; Xuefeng Zhang; Zhaojun Liu; Zhongkai Zhang; Jiangjiang Liu; Bingfei Zhang; Qijing Lin; Zhuangde Jiang

doi:10.3390/chemosensors10080309

Chemosensors (Aug 2022)

A High-Precision Three-Dimensional Probe Array Temperature Sensor

Bian Tian,
Yifan Xing,
Xuefeng Zhang,
Zhaojun Liu,
Zhongkai Zhang,
Jiangjiang Liu,
Bingfei Zhang,
Qijing Lin,
Zhuangde Jiang

Affiliations

Bian Tian: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Yifan Xing: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Xuefeng Zhang: Beijing Institute of Astronautical Systems Engineering, Beijing 100076, China
Zhaojun Liu: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Zhongkai Zhang: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Jiangjiang Liu: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Bingfei Zhang: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Qijing Lin: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Zhuangde Jiang: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China

DOI: https://doi.org/10.3390/chemosensors10080309
Journal volume & issue: Vol. 10, no. 8
p. 309

Abstract

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To meet the need for micro-volume devices for high-precision measurement of temperature, Cu-Constantan (CuNi45) thin films with a novel array structure of thermo-electrodes were designed and fabricated. The thermo-electrodes on the probe-type substrate were deposited by magnetron sputtering technology and the profiling mask was prepared by 3D printing technology. The comprehensive performance of the temperature sensor was improved by systematic optimization of the heat treatment process and accuracy correction algorithm. Results showed that the sensor can measure with an accuracy of up to ±0.19%FS from −60 °C to 200 °C. The three-dimensional probe array temperature sensor shows great advantages in sensitivity, reliability resolution, stability, and measurement accuracy.

Published in Chemosensors

ISSN: 2227-9040 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Science: Chemistry: Organic chemistry: Biochemistry
Website: http://www.mdpi.com/journal/chemosensors

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