Sub-10 μm-Thick Ge Thin Film Fabrication from Bulk-Ge Substrates via a Wet Etching Method

• Liming Wang,
• Ying Zhu,
• Rui-Tao Wen,
• Guangrui Xia

Affiliations

Liming Wang

Department of Materials Engineering, The University of British Columbia, Vancouver, BC, Canada

Ying Zhu

Department of Materials Engineering, The University of British Columbia, Vancouver, BC, Canada

Rui-Tao Wen

Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, China

Guangrui Xia

Department of Materials Engineering, The University of British Columbia, Vancouver, BC, Canada