Acetone gas sensor properties based on ZnO nanorod arrays synthesis by MA-CBD

Abstract

In present research, ZnO nanorod arrays have been synthesizedsuccessfully by microwave assisted chemical bath deposition (MA-CBD) method on SiO2 substrate.Structural and morphological properties were performing by XRD and FESEM, which prove the quality of prepared ZnO nanorod arrays. Gas sensing measurements for the resulting ZnO nanorod arrayshave been made by means of data acquisition system. The measurements show high sensitivity toward acetone vapor at different working temperatures.