Sensors (Jul 2022)

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

  • Si-jun Kim,
  • Sang-ho Lee,
  • Ye-bin You,
  • Young-seok Lee,
  • In-ho Seong,
  • Chul-hee Cho,
  • Jang-jae Lee,
  • Shin-jae You

DOI
https://doi.org/10.3390/s22155487
Journal volume & issue
Vol. 22, no. 15
p. 5487

Abstract

Read online

As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is reported. The basic properties of the MOLE probe are analyzed via three-dimensional electromagnetic wave simulation, with simulation results showing that the probe estimates electron density by measuring the surface wave resonance frequency from the reflection microwave frequency spectrum (S11). Furthermore, an experimental demonstration on a chamber wall measuring lateral electron density is conducted by comparing the developed probe with the cutoff probe, a precise electron density measurement tool. Based on both simulation and experiment results, the MOLE probe is shown to be a useful instrument to monitor lateral electron density.

Keywords