Localized and In-Situ Integration of Different Nanowire Materials for Electronic Nose Applications

Abstract

A new method for the site-selective synthesis of nanowires has been developed to enable the material growth with specific morphology and different compositions on one single chip. Based on a modification of the chemical vapor deposition method, the growth of nanowires on top of micromembranes can be easily tuned and represents a simple and adjustable fabrication process for the direct integration of different nanowire-based resistive multifunctional devices. This proof-of-concept is exemplified by the deposition of SnO2, WO3 and Ge nanowires on the membranes of one single chip and their gas sensing responses towards different concentrations of CO, NO2 and humidity diluted in synthetic air are evaluated. The principal component analysis of the collected data allows gas identification and, thus, the system is suitable for environmental monitoring.

Keywords

• chemical vapor deposition
• nanowires
• electronic nose