Optimization of semiconductor refrigeration cold stage usage conditions and its application in high moisture content samples in scanning electron mmicroscopy

Abstract

Objective: To effectively solve the difficulty of observing the electron microstructure of samples with high water content. Methods: A series of samples with high water content were observed by conventional scanning electron microscope with a new mode instrument combination of semiconductor cold cooling table. Results: Under the conditions of conductive tape as matrix, voltage 5 kV, electron beam spot of 50 or 60, and cold table temperature of 4 ℃, the sample with high water content did not need to be fixed and dehydrated, and its microstructure could be directly imaged under the scanning electron microscope to observe its microstructure. The microstructure of the sample hadd no deformation phenomena such as shrinkage, stretching and distortion, which could reflect the original appearance of the sample more realistically. Conclusion: The new mode of free combination of conventional scanning electron microscope with semiconductor cold cooling table is an effective means to solve the microstructure observation of high water content samples, and is an economical, cost-effective and widely adaptable mode.

Keywords

• scanning electron microscopy
• cryo-scanning electron microscopy
• environmental scanning electron microscopy
• semiconductor cold cooling table
• spot
• wet specimens