An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS

Abstract

The traditional microscopic speckle interferometer has limited applications in engineering due to its small field of view. In this paper, we propose a large-field microscopic speckle interferometer which embeds two doublet lens groups in the improved Mach–Zehnder optical path structure to expand its field of view. At the same time, the new system can reduce the coherent noise of reflected light in the optical path. We use this new system to measure the dynamic displacement process of the entire surface of the microchips. The experimental results show that our improved measurement system can achieve large-field, real-time and high-precision dynamic measurement of micro-electromechanical systems (MEMS).

Keywords

• large-field
• speckle interferometer
• MEMS
• displacement measurement