Miniature Capacitance Diaphragm Vacuum Sensor

Abstract

Commercial capacitance diaphragm vacuum sensor cannot be satisfied of the requirement for vacuum measurement in deep space exploration; the miniature capacitance diaphragm vacuum sensor has been designed. The linearity, stability and repeatability of miniature capacitance diaphragm vacuum sensor have been studied on the static expansion vacuum standard. The results show that the metrological characteristic of the miniature capacitance diaphragm vacuum sensor can meet the deep space exploration needs.

Keywords

• Miniature capacitance diaphragm vacuum sensor
• Linearity
• Stability
• Repeatability
• Experimental research.