Micromachines (Mar 2023)

Significant Enhanced Mechanical Properties of Suspended Graphene Film by Stacking Multilayer CVD Graphene Films

  • Binbin Xiao,
  • Mengqing Yin,
  • Wanfa Li,
  • Lingyan Liang,
  • Shixun Dai,
  • Xiaohui Zhang,
  • Wei Wang,
  • Zhaoping Liu

DOI
https://doi.org/10.3390/mi14040745
Journal volume & issue
Vol. 14, no. 4
p. 745

Abstract

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Suspended graphene film is of great significance for building high-performance electrical devices. However, fabricating large-area suspended graphene film with good mechanical properties is still a challenge, especially for the chemical vapor deposition (CVD)-grown graphene films. In this work, the mechanical properties of suspended CVD-grown graphene film are investigated systematically for the first time. It is found that monolayer graphene film is hard to maintain on circular holes with a diameter of tens of micrometers, which can be improved greatly by increasing the layer of graphene films. The mechanical properties of CVD-grown multilayer graphene films suspended on a circular hole with a diameter of 70 µm can be increased by 20%, and multilayer graphene films prepared by layer-layer stacking process can be increased by up to 400% for the same size. The corresponding mechanism was also discussed in detail, which might pave the way for building high-performance electrical devices based on high-strength suspended graphene film.

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