BIO Web of Conferences (Jan 2024)

Investigation of composition and origin of the intermediate layers at the Ga2O3/AlN and Ga2O3/Al2O3 interfaces

  • Schowalter Marco,
  • Raghuvansy S.,
  • Karg A.,
  • Vogt P.,
  • Schlom D.,
  • Jena D.,
  • Eickhoff M.,
  • Rosenauer A.

DOI
https://doi.org/10.1051/bioconf/202412924042
Journal volume & issue
Vol. 129
p. 24042

Abstract

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