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Open Physics
(Feb 2012)
Multiaxis interferometric displacement measurement for local probe microscopy
Lazar Josef,
Hrabina Jan,
Šerý Mojmír,
Klapetek Petr,
Číp Ondřej
Affiliations
Lazar Josef
Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic
Hrabina Jan
Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic
Šerý Mojmír
Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic
Klapetek Petr
Czech Metrology Institute, Okružní 31, 638 00, Brno, Czech Republic
Číp Ondřej
Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic
DOI
https://doi.org/10.2478/s11534-011-0093-5
Journal volume & issue
Vol. 10, no. 1
pp. 225 – 231
Abstract
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No abstracts available.
Keywords
interferometry
nanometrology
microscopy
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