Nature Communications (Nov 2022)

Defect free strain relaxation of microcrystals on mesoporous patterned silicon

  • Alexandre Heintz,
  • Bouraoui Ilahi,
  • Alexandre Pofelski,
  • Gianluigi Botton,
  • Gilles Patriarche,
  • Andrea Barzaghi,
  • Simon Fafard,
  • Richard Arès,
  • Giovanni Isella,
  • Abderraouf Boucherif

DOI
https://doi.org/10.1038/s41467-022-34288-4
Journal volume & issue
Vol. 13, no. 1
pp. 1 – 9

Abstract

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Many complex devices rely on epitaxial growth with high crystallinity and accurate composition. Here authors report epitaxial growth of Ge on deep etched porous Si pillars to provide a fully compliant substrate enabling elastic relaxation of defect free Ge microcrystals.