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CHIMIA
(May 2018)
High-resolution, Non-destructive X-ray Tomography
Mirko Holler,
Jörg Raab,
Oliver Bunk,
Ana Diaz,
Elisabeth Müller,
Roberto Dinapoli,
Michal Odstrcil,
Esther H. R. Tsai,
Manuel Guizar-Sicairos,
Gabriel Aeppli
Affiliations
Mirko Holler
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Jörg Raab
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Oliver Bunk
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Ana Diaz
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Elisabeth Müller
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Roberto Dinapoli
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Michal Odstrcil
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Esther H. R. Tsai
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Manuel Guizar-Sicairos
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
Gabriel Aeppli
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
[email protected]
DOI
https://doi.org/10.2533/chimia.2018.339
Journal volume & issue
Vol. 72, no. 5
Abstract
Read online
No abstracts available.
Keywords
Integrated circuits
Nano tomography
Ptychography
X-ray imaging
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