The Changes of Structure and Electrical Properties of Thin Films During Long-Term Aging

Abstract

The changes of surface structure and electrical properties of crystalline thin films of ternary compounds (La, Y, Sc)-(Ni, Fe)-Ge with metal content not more than 50 at. percent, which are obtained by vacuum deposition, are investigated. The directions of growth defects of films in aging over 20 years shown also as the influence of aging on the electrical properties of the condensates are analyzed. Key words: thin films, aging, electron microscopy.