Axial outflows from conical wire array z-pinches as a tool for surface modifications

Abstract

A novel application for conical wire array Z-pinches to surface science is presented. The axial outflows emitted by a tungsten conical wire array in the form of both a dense plasma jet and energetic ions are used to produce morphological modification of substrate surfaces without using any kind of chemical treatment. In particular, surface modifications of (100) oriented Si substrates in the form of micropores and stripes-like formations after a single interaction of the Si to the axial outflows are obtained. It is found that the prevalence of each kind of formation, either micropores or stripes, on the treated substrate depends on the relative position of the target with respect to the wire array. The results indicate that at distances of 11 cm over the array there is still effect of the dense plasma jet outflow since both micropores and stripes are found. On the contrary, solely stripe-like patterns are found at greater distances where the effect of the dense plasma outflow is minimal or null, and only the ion outflow irradiates the surface. The description of the method and future perspectives of this novel application of surface treatment are shown and discussed.

Keywords

• Silicon micropores
• Z-pinch
• Wire arrays
• Plasma-surface interaction
• Surface treatment
• Silicon wrinkles