Multilayer Mo2N-Ag/SiNx films for demanding applications: Morphology, structure and temperature-cycling tribological properties

Abstract

Nowadays there is the need to avoid the excessive consumption of liquid lubricant oils, as they are harmful to the environment and hard to disposal. Self-lubricant films have been seen as the sustainable solution to achieve a long-term lubrication under high temperature-cycling conditions. In this manuscript, multilayer Mo2N-Ag/SiNx films with a fixed modulation ratio (thickness of Mo2N-Ag to SiNx) of 3:1, with changing modulation period (Λ, thickness of Mo2N-Ag and SiNx) from 8 to 200 nm were produced to achieve an effective balance between the lubricious phase diffusion control and the adequate formation of the low friction tribo-layers. Results showed that a dual-phase of fcc-Mo2N and fcc-Ag co-existed in Mo2N-Ag layers, while the SiNx layer exhibited an amorphous character. Both room temperature (RT) lubricant and wear-resistance properties of the films were improved by increasing Λ from 8 to 64 nm, while a further increase of Λ degraded the wear-resistance properties. The multilayer film at Λ = 64 nm exhibited an excellent RT-500 °C temperature-cycling tribological properties. Mechanical properties and the synergistic effect of both modulation layers were the cause for the improvement of the tribological properties.

Keywords

• Magnetron sputtering
• Mo2N-Ag/SiNx multilayer films
• Modulation period
• Tribological properties
• Temperature-cycling tribology