Fabrication of Silicon Dioxide by Photo-Chemical Vapor Deposition to Decrease Detector Current of ZnO Ultraviolet Photodetectors

• Sheng-Joue Young,
• Yi-Hsing Liu,
• Shoou-Jinn Chang,
• Chieh-Fei Chiu

Affiliations

Sheng-Joue Young

Department of Electronic Engineering, National United University, Miaoli, Taiwan

Yi-Hsing Liu

Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan

Shoou-Jinn Chang

Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan

Chieh-Fei Chiu

Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan