ACS Omega (Dec 2023)

Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates

  • Gulnur Akhtanova,
  • Yerassyl Yerlanuly,
  • Hryhorii P. Parkhomenko,
  • Mykhailo V. Solovan,
  • Andrii I. Mostovyi,
  • Aliya K. Nurmukhanbetova,
  • Alexander V. Kireyev,
  • Igor V. Danko,
  • Pavel A. Oreshkin,
  • Timur K. Zholdybayev,
  • Daniyar M. Janseitov,
  • Tlekkabul S. Ramazanov,
  • Viktor V. Brus

DOI
https://doi.org/10.1021/acsomega.3c07053
Journal volume & issue
Vol. 9, no. 1
pp. 925 – 933

Abstract

Read online

No abstracts available.