Investigation of a novel AlZnN semiconductor alloy

Abstract

The formation of an AlZnN alloy was investigated as a route to tune the bandgap of Zn3N2. A significant shift of the bandgap was observed in the deposited films, increasing from 1.4 eV for Zn3N2 to 2.8 eV for AlZnN alloys with an AlN fraction of × = 0.19. The refractive index followed a similar trend, approaching that of AlN. The charge carrier density of AlZnN samples was significantly reduced reaching values in the order of 1016 cm−3.

Keywords

• Physical vapour deposition
• Semiconductors
• Zinc nitride
• Semiconductor alloy
• Bandgap tuning