Beilstein Journal of Nanotechnology (Jul 2017)

Parylene C as a versatile dielectric material for organic field-effect transistors

  • Tomasz Marszalek,
  • Maciej Gazicki-Lipman,
  • Jacek Ulanski

DOI
https://doi.org/10.3762/bjnano.8.155
Journal volume & issue
Vol. 8, no. 1
pp. 1532 – 1545

Abstract

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An emerging new technology, organic electronics, is approaching the stage of large-scale industrial application. This is due to a remarkable progress in synthesis of a variety of organic semiconductors, allowing one to design and to fabricate, so far on a laboratory scale, different organic electronic devices of satisfactory performance. However, a complete technology requires upgrading of fabrication procedures of all elements of electronic devices and circuits, which not only comprise active layers, but also electrodes, dielectrics, insulators, substrates and protecting/encapsulating coatings. In this review, poly(chloro-para-xylylene) known as Parylene C, which appears to become a versatile supporting material especially suitable for applications in flexible organic electronics, is presented. A synthesis and basic properties of Parylene C are described, followed by several examples of use of parylenes as substrates, dielectrics, insulators, or protecting materials in the construction of organic field-effect transistors.

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