A Versatile Technology Based on Deep Reactive Ion Etching and Anodic Bonding for the Application of Micromixers and Microfilters

Abstract

A technology for the fabrication of silicon micromixers and microfilters is presented with their applications being analyzed. The versatility of this technology is observed with the use of two different photolithographic masks where active microfluidic components have been developed. The silicon micromixers and microfilters were developed and manufactured by photolithography (PL) and deep-reactive ion etching (DRIE) and then bonded onto sand-blasted glass wafers by anodic bonding. The fluidic flow within the specialized microchannel was observed under an optical microscope with micromixing using two differently colored dyes and the microfiltration of poly (D, L lactic-co-glycolic acid) microparticles (MP-PLGA) for size-sorting and separation Finally, the microfiltering device was injected with a whole blood sample for the separation of larger leukocyte cells.

Keywords

• Deep Reactive Ion Etching
• Anodic Bonding
• Silicon
• Micromixer
• Microfilter.