Processing and Characterization of Monolithic Passive-Matrix GaN-Based MicroLED Arrays With Pixel Sizes From 5 to 50 &#x00B5;m

Steffen Bornemann; Jan Gulink; Victor Moro; Joan Canals Gil; Stefan Wolter; Georg Schottler; Daria Bezshlyakh; Joan Daniel Prades; Angel Dieguez; Andreas Waag

doi:10.1109/JPHOT.2021.3106584

IEEE Photonics Journal (Jan 2021)

Processing and Characterization of Monolithic Passive-Matrix GaN-Based MicroLED Arrays With Pixel Sizes From 5 to 50 µm

Steffen Bornemann,
Jan Gulink,
Victor Moro,
Joan Canals Gil,
Stefan Wolter,
Georg Schottler,
Daria Bezshlyakh,
Joan Daniel Prades,
Angel Dieguez,
Andreas Waag

Affiliations

Steffen Bornemann: ORCiD; Institute of Semiconductor Technology, Technische Universität Braunschweig, Braunschweig, Germany
Jan Gulink: ORCiD; Institute of Semiconductor Technology, Technische Universität Braunschweig, Braunschweig, Germany
Victor Moro: Department of Electronic and Biomedical Engineering, Universitat de Barcelona, Barcelona, Spain
Joan Canals Gil: ORCiD; Department of Electronic and Biomedical Engineering, Universitat de Barcelona, Barcelona, Spain
Stefan Wolter: ORCiD; Institute of Semiconductor Technology, Technische Universität Braunschweig, Braunschweig, Germany
Georg Schottler: ORCiD; Institute of Semiconductor Technology, Technische Universität Braunschweig, Braunschweig, Germany
Daria Bezshlyakh: ORCiD; Institute of Semiconductor Technology, Technische Universität Braunschweig, Braunschweig, Germany
Joan Daniel Prades: ORCiD; Department of Electronic and Biomedical Engineering, Universitat de Barcelona, Barcelona, Spain
Angel Dieguez: ORCiD; Department of Electronic and Biomedical Engineering, Universitat de Barcelona, Barcelona, Spain
Andreas Waag: Institute of Semiconductor Technology, Technische Universität Braunschweig, Braunschweig, Germany

DOI: https://doi.org/10.1109/JPHOT.2021.3106584
Journal volume & issue: Vol. 13, no. 5
pp. 1 – 9

Abstract

Read online

MicroLED arrays with the capability of switching each pixel separately with high frequency can serve as structured micro-illumination light engines for applications in sensing, optogenetics, microscopy and many others. We describe a scalable chip process chain for the fabrication of passive-matrix microLED arrays, which were integrated with PCB-based driving electronics. The arrays were produced by deep-etching of conventional planar LED structures on sapphire, followed by filling and planarization steps. The pixel resolution lies in the range of 254 to 2540 pixels-per-inch (ppi), the arrays consist of 32 x 32 pixels. Optical output powers up to 50 µW per pixel were measured. In comparison to CMOS-based approaches, the presented technology is a simplified strategy to produce microLED arrays with high pixel counts.

Published in IEEE Photonics Journal

ISSN: 1943-0655 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=4563994

About the journal

Abstract

Keywords