MOX Resistive Microsensors for Low Concentration Methane Detection

Abstract

A series of MOX resistive sensors with CuO and CoO-sensitive films were prepared using an eco-friendly technique (sol-gel). The sensor transducers are based on a custom-made alumina wafer with gold (Au) or platinum (Pt) interdigital electrodes (IDE) printed onto the alumina surface. The sensors’ responses (sensor electrical resistance variations, measured at the IDE’s contact pads) were recorded under lab conditions (dried target and carrier gas from gas cylinders) in a constant gas flow and with a 1.5 Volts direct current (DC) being applied to the IDE as sensor operating voltage.

Keywords

• films
• sol-gel
• alumina wafer with Pt(Au) IDE
• methane
• laboratory conditions