APL Materials (Apr 2017)

Research Update: Diode performance of the Pt/Al2O3/two-dimensional electron gas/SrTiO3 structure and its time-dependent resistance evolution

  • Taehwan Moon,
  • Hae Jun Jung,
  • Yu Jin Kim,
  • Min Hyuk Park,
  • Han Joon Kim,
  • Keum Do Kim,
  • Young Hwan Lee,
  • Seung Dam Hyun,
  • Hyeon Woo Park,
  • Sang Woon Lee,
  • Cheol Seong Hwang

DOI
https://doi.org/10.1063/1.4967280
Journal volume & issue
Vol. 5, no. 4
pp. 042301 – 042301-7

Abstract

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Time domain electric pulse measurements were conducted on a capacitor consisting of a Pt film as the top electrode, atomic-layer-deposited 6.5-nm-thick amorphous Al2O3 as the dielectric layer, and two-dimensional electron gas (2DEG) at the interface between Al2O3 and SrTiO3 as the bottom electrode. The sample showed highly useful current-voltage characteristics as the selector in cross-bar array resistance switching random access memory. The long-term (order of second) variation in the leakage current when the Pt electrode was positively biased was attributed to the field-induced migration of oxygen vacancies between the interior of the Al2O3 and the 2DEG region. Relaxation of the vacancy concentration occurred even at room temperature.