Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach

Paul Stritt; Juliane Doster; Thomas Dekorsy; Vitalyi Gusev; Eva Weig; Mike Hettich

doi:10.3390/proceedings2020056031

Proceedings (Dec 2020)

Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach

Paul Stritt,
Juliane Doster,
Thomas Dekorsy,
Vitalyi Gusev,
Eva Weig,
Mike Hettich

Affiliations

Paul Stritt: Department of Physics, University of Konstanz, D-78457 Konstanz, Germany
Juliane Doster: Department of Physics, University of Konstanz, D-78457 Konstanz, Germany
Thomas Dekorsy: Institute for Technical Physics, German Aerospace Center (DLR), D-70569 Stuttgart, Germany
Vitalyi Gusev: LAUM, UMR-CNRS 6613, Le Mans Université, Avenue O. Messiaen, 72085 Le Mans, France
Eva Weig: Department of Physics, University of Konstanz, D-78457 Konstanz, Germany
Mike Hettich: Research Center for Non-Destructive Testing (RECENDT), 4040 Linz, Austria

DOI: https://doi.org/10.3390/proceedings2020056031
Journal volume & issue: Vol. 56, no. 1
p. 31

Abstract

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Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions.

Published in Proceedings

ISSN: 2504-3900 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: General Works
Website: http://www.mdpi.com/journal/proceedings

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