Microstructured electrodes supported on serpentine interconnects for stretchable electronics

Abstract

In this work, it is reported the fabrication of highly stretchable electrodes on a polydimethylsiloxane substrate. A laser ablation technique is used to design lithium nickel manganese oxide micropillars supported on serpentine Al interconnects. Morphological, mechanical, and chemical analyses have been investigated by scanning electron microscopy, optical microscopy, and energy dispersive X-Ray spectroscopy. We show that unlike compact and continuous electrode thin-films, vertical micropillar structures supported on Al serpentines can be stretched up to 70% without structural damage, which opens a new alternative for the fabrication and development of truly stretchable devices such as stretchable micro-batteries.