Crystals (Aug 2021)

UV Durable LCOS for Laser Processing

  • Yasuki Sakurai,
  • Masashi Nishitateno,
  • Masahiro Ito,
  • Kohki Takatoh

DOI
https://doi.org/10.3390/cryst11091047
Journal volume & issue
Vol. 11, no. 9
p. 1047

Abstract

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Liquid-Crystal-On-Silicon (LCOS) Spatial Light Modulator (SLM) is widely used as a programmable adaptive optical element in many laser processing applications with various wavelength light sources. We report UV durable liquid-crystal-on-silicon spatial light modulators for one-shot laser material processing. Newly developed LCOS consists of UV transparent materials and shows a lifetime 480 times longer than the conventional one in 9.7 W/cm2 illumination at 355 nm. We investigated the durability of polymerization inhibitor mixed liquid crystal in order to extend its lifetime.

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