ABOUT TECHNOLOGIES OF X-RAY SYSTEMS FOR CONTROL OF ELECTRONIC COMPONENTS

Abstract

Introduction. X-ray methods are currently widely used in manufacturing of various products and components of the electronics industry, including micro- and nano-electronics. One of the most informative and illustrative methods is projection X-ray microscopy. Specialized X-ray systems for process control are developed and used in industry. The key element in the design of an X-ray inspection system is an X-ray tube. In the overwhelming majority of cases, X-ray inspection systems are based on collapsible microfocus x-ray tubes with constant pumping. This greatly complicates the design of the installation, increases its dimensions, weight and cost. Objective. Analysis of possible technical and technological solutions that improve the availability of the X-ray system for monitoring of electronic components while maintaining the information content of the control. Materials and methods. The article presents the results of analytical studies of assessment of the degree of influence of the main parameters of the X-ray tube – the size of the focal spot and the focal length – on the resolution of the resulting X-ray images. The advantages and disadvantages of two variants of the construction of the X-ray inspection systems are described: based on collapsible and based on sealed X-ray tubes. The dependence of the size of the focal spot on the voltage on the X-ray tube and on the power supplied by the electron beam to the target of the X-ray tube is analyzed. It is shown that sealed (from a vacuum pumping system) micro focus X-ray tubes can be successfully used as a radiation source in installations for X-ray inspection. It is concluded that in most cases, sealed tubes are more practical. Results. In solving of most problems of non-destructive testing of electronic components in the composition of the Xray system, X-ray sources based on sealed X-ray tubes can be successfully used. Due to this, dimensions, weight, and the cost of an X-ray system for monitoring of electronic components are substantially reduced. Conclusion. Sealed X-ray tubes are an effective alternative in the development of an X-ray system for monitoring of electronic components, which enables to fundamentally increase the availability of such a system.

Keywords

• x-ray projection microscopy
• sealed (closed) microfocus tubes
• collapsible (open) microfocus tubes
• microfocus x-ray systems
• resolution