Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

Abstract

The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch of resonant structures and consequently restrict the performance improvement of the gyroscope. This study proposes a mechanical trimming technique combining the addition and removal of gold in a ring MEMS gyroscope. Firstly, the analysis of the gyroscope dynamics and error model and trimming theory provides theoretical guidance for the trimming process. Secondly, the method of adjusting the mass is investigated, and the ablation threshold of femtosecond laser parameters on gold is analyzed, which provides the process with parameters for the trimming experiment. Finally, the frequency trimming process is conducted in three steps, including the addition of gold spheres and the removal of gold spheres and gold film, which are applicable to the trimming process at different rates of frequency split. The results shows that the proposed method can reduce the frequency split of the gyroscope from 4.36 to 0.017 Hz.

Keywords

• MEMS gyroscope
• frequency splitting
• mechanical trimming
• femtosecond laser