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BIO Web of Conferences
(Jan 2024)
Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing
Park Jucheol,
Park Yeong Gyeong,
Kang Min-Ho,
Lee Myung-Keun,
Hyun Moon Seop
Affiliations
Park Jucheol
Gumi Electronics & Information Technology Research Institute (GERI)
Park Yeong Gyeong
Gumi Electronics & Information Technology Research Institute (GERI)
Kang Min-Ho
Department of Nano-process, National NanoFab Center (NNFC)
Lee Myung-Keun
Department of Nano-process, National NanoFab Center (NNFC)
Hyun Moon Seop
Department of Nano-process, National NanoFab Center (NNFC)
DOI
https://doi.org/10.1051/bioconf/202412924040
Journal volume & issue
Vol. 129
p. 24040
Abstract
Read online
No abstracts available.
Keywords
hf0.5zr0.5o2
ferroelectricity
hr-stem
efm
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