Design and Realization of MEMS Heart Sound Sensor with Concave, Racket-Shaped Cilium

Yuhua Yang; Bo Wang; Jiangong Cui; Guojun Zhang; Renxin Wang; Wendong Zhang; Changde He; Yirui Li; Pengcheng Shi; Shuotong Wang

doi:10.3390/bios12070534

Biosensors (Jul 2022)

Design and Realization of MEMS Heart Sound Sensor with Concave, Racket-Shaped Cilium

Yuhua Yang,
Bo Wang,
Jiangong Cui,
Guojun Zhang,
Renxin Wang,
Wendong Zhang,
Changde He,
Yirui Li,
Pengcheng Shi,
Shuotong Wang

Affiliations

Yuhua Yang: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Bo Wang: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Jiangong Cui: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Guojun Zhang: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Renxin Wang: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Wendong Zhang: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Changde He: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Yirui Li: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Pengcheng Shi: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
Shuotong Wang: State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China

DOI: https://doi.org/10.3390/bios12070534
Journal volume & issue: Vol. 12, no. 7
p. 534

Abstract

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The biomedical acoustic signal plays an important role in clinical non-invasive diagnosis. In view of the deficiencies in early diagnosis of cardiovascular diseases, acoustic properties of S1 and S2 heart sounds are utilized. In this paper, we propose an integrated concave cilium MEMS heart sound sensor. The concave structure enlarges the area for receiving sound waves to improve the low-frequency sensitivity, and realizes the low-frequency and high-sensitivity characteristics of an MEMS heart sound sensor by adopting a reasonable acoustic package design, reducing the loss of heart sound distortion and faint heart murmurs, and improving the auscultation effect. Finally, experimental results show that the integrated concave ciliated MEMS heart sound sensor’s sensitivity reaches −180.6 dB@500 Hz, as compared with the traditional bionic ciliated MEMS heart sound sensor; the sensitivity is 8.9 dB higher. The sensor has a signal-to-noise ratio of 27.05 dB, and has good heart sound detection ability, improving the accuracy of clinical detection methods.

Published in Biosensors

ISSN: 2079-6374 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Chemical technology: Biotechnology
Website: http://www.mdpi.com/journal/biosensors

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