Microsystems & Nanoengineering (Jan 2024)

Correction: Integrated silicon photonic MEMS

  • Niels Quack,
  • Alain Yuji Takabayashi,
  • Hamed Sattari,
  • Pierre Edinger,
  • Gaehun Jo,
  • Simon J. Bleiker,
  • Carlos Errando-Herranz,
  • Kristinn B. Gylfason,
  • Frank Niklaus,
  • Umar Khan,
  • Peter Verheyen,
  • Arun Kumar Mallik,
  • Jun Su Lee,
  • Moises Jezzini,
  • Iman Zand,
  • Padraic Morrissey,
  • Cleitus Antony,
  • Peter O’Brien,
  • Wim Bogaerts

DOI
https://doi.org/10.1038/s41378-023-00649-2
Journal volume & issue
Vol. 10, no. 1
pp. 1 – 1

Abstract

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