Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater

Abstract

Metal oxide semiconductors infused with noble metals or metalloids are studied and employed in semiconductor sensors applications to a greater extent. In this study, antimony (Sb) is doped with ZnO in 4 different concentrations to compare the optimal parameters in gas sensing properties. Sb/ZnO nanostructure is synthesized by hydrothermal process and deposited on MEMS (Micro electro mechanical system) microheater device. The morphology of the nanostructure is analyzed for planar structure, oxidation states and the presence of Sb/ZnO is successfully verified. Ozone is a powerful oxidizing gas which is a health hazard in public places, so low concentrations of ozone is tested with Sb/ZnO sensor at various parameters. Since Sb acts as catalyst to promote the gas sensing properties, the sensor responses have been enhanced compared to pure ZnO sensor. Sensor performed its best at 200 °C and has the lowest detection gas concentration of 10 ppb. Sb/ZnO showed good selectivity over ozone gas.

Keywords

• Sb doped ZnO
• MEMS microheater
• Ozone gas sensing