The technology of measuring the geometric parameters of a micro-tool based on the model of human sight

Abstract

A scheme of an optical microscope is described, which includes a special bi telecentric optics for the formation of a diode support and a telecentric objective for capturing the image. The use of such optics makes it possible to reduce the effect of diffraction effects at the edges of the shadow structure and to measure with the help of a microscope the parameters of a cutting micro-tool such as a protrusion and a diameter. An algorithm for modeling the two main visual channels of the human eye is developed allowing rapid detection of spatial-temporal processes and noise and providing a measurement of the contour of the cutting edge of the instrument with a sub pixel (up to 0.01 pixel) error and determining the size of the cutting tool with an error of 0.5 μm.

Keywords

• telecentric objective
• human visual model
• microinstrument
• subpixel accuracy