Improvement of the Properties of Direct-Current Magnetron-Sputtered Al-Doped ZnO Polycrystalline Films Containing Retained Ar Atoms Using 10-nm-Thick Buffer Layers

• Junichi Nomoto,
• Hisao Makino,
• Tomohiko Nakajima,
• Tetsuo Tsuchiya,
• Tetsuya Yamamoto

Affiliations

Junichi Nomoto

Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan

Hisao Makino

Materials Design Center, Research Institute, Kochi University of Technology, Kami, Kochi, Japan

Tomohiko Nakajima

Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan

Tetsuo Tsuchiya

Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan

Tetsuya Yamamoto

Materials Design Center, Research Institute, Kochi University of Technology, Kami, Kochi, Japan