Microsystems & Nanoengineering (Jun 2024)

Smart mid-infrared metasurface microspectrometer gas sensing system

  • Jiajun Meng,
  • Sivacarendran Balendhran,
  • Ylias Sabri,
  • Suresh K. Bhargava,
  • Kenneth B. Crozier

DOI
https://doi.org/10.1038/s41378-024-00697-2
Journal volume & issue
Vol. 10, no. 1
pp. 1 – 9

Abstract

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Abstract Smart, low-cost and portable gas sensors are highly desired due to the importance of air quality monitoring for environmental and defense-related applications. Traditionally, electrochemical and nondispersive infrared (IR) gas sensors are designed to detect a single specific analyte. Although IR spectroscopy-based sensors provide superior performance, their deployment is limited due to their large size and high cost. In this study, a smart, low-cost, multigas sensing system is demonstrated consisting of a mid-infrared microspectrometer and a machine learning algorithm. The microspectrometer is a metasurface filter array integrated with a commercial IR camera that is consumable-free, compact ( ~ 1 cm3) and lightweight ( ~ 1 g). The machine learning algorithm is trained to analyze the data from the microspectrometer and predict the gases present. The system detects the greenhouse gases carbon dioxide and methane at concentrations ranging from 10 to 100% with 100% accuracy. It also detects hazardous gases at low concentrations with an accuracy of 98.4%. Ammonia can be detected at a concentration of 100 ppm. Additionally, methyl-ethyl-ketone can be detected at its permissible exposure limit (200 ppm); this concentration is considered low and nonhazardous. This study demonstrates the viability of using machine learning with IR spectroscopy to provide a smart and low-cost multigas sensing platform.