Dynamic behaviour and stability analysis of a compensated aerostatic pad

Abstract

Thanks to their low friction, aerostatic pads have important applications in precision positioning systems and linear guides. A simple and cheap solution to increase the static stiffness of aerostatic pads is to add a proper designed pneumatic valve to regulate the air flow supplied to the bearing. However, integrating aerostatic pads with additional devices can reduce its dynamic performance. This paper presents a numerical study on the dynamic behaviour and stability a commercial aerostatic pad controlled by a custom-built diaphragm valve. The bearing performance is studied by means of a lumped parameters model. Air bearing stiffness and damping are analysed in the frequency domain. Subsequently, the lumped model is linearized to investigate the stability of the system by means of Routh-Hurwitz method. The performance of the controlled air pad is compared to that of a simple commercial air pad.