A design and manufacture of the MEMS flexible antenna based on PDMS

Xu Yongqing; Zhang Binzhen; Duan Junping; Xiao Hong; Lin Xuechen; Huang Chengyuan

doi:10.16157/j.issn.0258-7998.180765

Dianzi Jishu Yingyong (Nov 2018)

A design and manufacture of the MEMS flexible antenna based on PDMS

Xu Yongqing,
Zhang Binzhen,
Duan Junping,
Xiao Hong,
Lin Xuechen,
Huang Chengyuan

Affiliations

Xu Yongqing: Key Laboratory of Instrumentation Science & Dynamic Measurement，North University of China，Taiyuan 030051，China
Zhang Binzhen: Key Laboratory of Instrumentation Science & Dynamic Measurement，North University of China，Taiyuan 030051，China
Duan Junping: Key Laboratory of Instrumentation Science & Dynamic Measurement，North University of China，Taiyuan 030051，China
Xiao Hong: Key Laboratory of Instrumentation Science & Dynamic Measurement，North University of China，Taiyuan 030051，China
Lin Xuechen: Key Laboratory of Instrumentation Science & Dynamic Measurement，North University of China，Taiyuan 030051，China
Huang Chengyuan: Key Laboratory of Instrumentation Science & Dynamic Measurement，North University of China，Taiyuan 030051，China

DOI: https://doi.org/10.16157/j.issn.0258-7998.180765
Journal volume & issue: Vol. 44, no. 11
pp. 5 – 8

Abstract

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A compact ultra-wideband and flexible MEMS monopole antenna fed by coplanar waveguide(CPW) was proposed, which has the characteristics of simple structure, light quality, ease of integration and flexible bending. The antenna used a PDMS material with outstanding flexibility and great self-recovery as its substrate. The disc shaped metal radiation structure was designed on the side of the flexible substrate, and the CPW structure was integrated with the antenna on the same side of the substrate. In the experiment, it is proved that the combined treatment of oxygen plasma and SDS can effectively improve the adhesion effect of photoresist and PDMS surface. The MEMS monopole flexible antennas fed by CPW were separately fabricated on the PDMS flexible substrate by metal lift-off process based on AZ6130，RZJ304 and AZ5214E photoresist, and the performances and the lift-off difficulty of the antennas fabricated based on different photoresists were compared. The frequency band of the antenna is 3.3 GHz to 5 GHz, of which the impedance matching is perfect and the radiation directivity is stable. It can be applied to 5G communication system, and also provides a reference for the research of flexible antenna.

Published in Dianzi Jishu Yingyong

ISSN: 0258-7998 (Print)
Publisher: National Computer System Engineering Research Institute of China
Country of publisher: China
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics
Website: http://journal.chinaaet.com/en

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